Release Optimization of Suspended Membranes in MEMS

Gonzalez Vidal, Jose Luis

2012

SALVADOR MENDOZA-ACEVEDO, MARIO ALFREDO REYES-BARRANCA, EDGAR NORMAN VÁZQUEZ-ACOSTA, JOSÉ ANTONIO MORENO-CADENAS & JOSÉ LUIS GONZÁLEZ-VIDAL, EDITOR: MOJTABA KAHRIZI, ED. INTECH, CROATIA, 2012.ISBN 978-953-307-906-6.

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